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Thermal Evaporator

Thermal Evaporator ZHD400

Feature/Function:

* Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;

* Equipped with 4~6 groups of evaporation sources, compatible with organic evaporation and inorganic evaporation, multi-source co-evaporation obtain composite film/partial evaporation obtain multi-layer film, powerful and stable performance;   

* Suitable for laboratory preparation of metal mono film, semiconductor film, organic film, also can be used for pre-production process test, etc.;

* Suitable for organic combination of evaporation coating and glove box environment, to achieve evaporation, encapsulation, testing and other process seamless docking, widely used in perovskite solar cell/OPV organic solar cell, OLED film and other research systems, etc..


Application: It is widely used in the research and small batch preparation of new film materials for colleges & universities, research institutes and enterprises.


Technical Parameters

Equipment NameThermal Evaporator
ModelZHD400
Coating MethodMulti-source evaporation coating
Chamber StructureBox-type front door structure
Chamber SizeL400×W440×H450mm
Baking TemperatureRoom temperature~300(572)
Rotating Substrate Holder120mm×120mm
Substrate Holder LiftManually adjust the lifting height between 0-80mm
Film Thickness Nonuniformity≤±5.0%
Evaporation Source

2~3 Groups of metal sources,

 2~3 Groups of organic sources

Control MethodPLC control
Occupied Area(Mainframe) L1750×W850×H1910mm
Power≥8kW